半导体先进光刻理论与技术

Brand: 化学工业出版社    Sold By: EM China
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术
半导体先进光刻理论与技术

半导体先进光刻理论与技术

Brand: 化学工业出版社    Sold By: EM China
$77.90 In Stock
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半导体先进光刻理论与技术

半导体先进光刻理论与技术

$77.90

产品特色

目  录
Product Details
产品特色

目  录
第1章 光刻工艺概述 1
1.1 从微电子器件的微型化到纳米技术 1
1.2 发展历程 3
1.3 步进扫描投影光刻机的空间像5
1.4 光刻胶工艺 8
1.5 工艺特性参数 10
1.6 总结.16
参考文献 17

第2章 投影光刻成像理论 19
2.1 投影光刻机 19
2.2 成像理论 20
2.2.1 傅里叶光学描述方法 20
2.2.2 倾斜照明与部分相干成像 24
前  言
先进半导体光刻是超精密微纳结构制备技术,是超精密光学系统与精巧设计、高度优化的光化学材料和工艺的高度融合,支撑了现代信息社会的发展。该技术有机地结合了应用光学、化学与材料科学,为应用科学与技术领域的科学家和工程师提供了理想的施展空间。多年来,光刻图形化技术的发展主要由尺寸微缩驱动,专注于提高分辨率,不断延续戈登 ·摩尔的预言,将更多组件集成进集成电路中。尽管这种微缩尚未达到极限,但在半导体芯片上制备更多、更小、均匀、无缺陷微细图形的难度越来越大,成本也不断提高。用于新兴应用的下一代光刻技术需要聚焦三维形状控制、新型(功能)材料集成、非平面图形化工艺、应用导向型目标图形设计等不同需求。光刻技术 50多年发展历程中积累的知识和经验,为开发新型微纳技术的应用打下了坚实的基础。
本书的内容主要来源于本人在埃尔朗根 -纽伦堡大学(埃尔朗根 -纽伦堡弗里德里希 -亚历山大大学)开设的光刻课程,课程内容包括光刻技术、物理效应和建模等。本书还收录了本人为一些公司以及学术会议同期活动开设的光刻专题讲座的内容。本书旨在帮助物理、光学、计算工程、数学、化学、材料科学、纳米技术和其他专业背景的学生开启通往纳米制造光刻技术领域的大门,帮助工程师和管理人员了解光刻领域的常见方法与应用,拓展知识面。

Shipping Overview: 

Free Shipping: We offer free shipping on most orders within the U.S. Certain items may require a shipping fee due to size or handling needs. 

Order Processing: Please allow 1-2 business days for order processing and preparation before shipment. 

Domestic Shipping: Orders within the U.S. are shipped via USPS or FedEx, depending on the origin of the product. The average transit time is 3-7 business days. 

International Shipping: Currently, we only ship within the USA. 

Tracking Information: Every order is trackable. You will receive a tracking number once your order has been shipped. Products may be shipped from various global fulfillment centers.

Shipping Delays: 

Please note that shipping times may vary due to factors beyond our control, such as weather conditions, natural disasters, or peak holiday periods. While we strive to ensure timely delivery, the exact arrival time cannot be guaranteed and is managed by the shipping carrier.

Shipping Options:

  • Standard Delivery: Most orders are shipped within 3-7 business days. Larger items may utilize LTL shipping for safe handling.

  • Handling Time: We handle shipments on business days (Monday - Friday), with a preparation time of 1-2 days.

  • Additional Charges: Some items require additional shipping charges due to their size, weight, or special handling. These charges are specified on the product pages and are not eligible for shipping discounts.

  • Exclusions: Gift cards, packaging, taxes, and prior purchases do not count toward the minimum purchase requirement for free shipping. This offer is valid only for shipments to U.S. addresses, including Puerto Rico.

Delivery Details:

  • Estimates: Standard shipping within the US typically takes 3-7 business days. These are estimates and not guarantees.

  • Shipping Restrictions: We ship to all 50 states, Washington, DC, U.S. territories, and APO/FPO/DPO addresses. Shipping options vary based on the delivery address.

  • Remote Areas: Shipments to remote areas may incur additional charges or require pickup from a nearby shipping partner’s location.

Shipping Confirmation:

You will receive a shipping confirmation email with a tracking number as soon as your order is dispatched. If you do not receive this email immediately, please be assured that your items will arrive within the estimated delivery window provided at checkout.

Order Modifications:

If you need to cancel or modify your order, please contact our customer support immediately.

Issues with Delivery:

If your order shows as delivered but you have not received it, please contact the shipping carrier directly to resolve the issue. For persistent problems, contact our customer service at cs@everymarket.com.

Customer Support:

Our team is available 24/7 to assist you with any questions or concerns regarding your order. We are committed to ensuring a smooth shopping experience.

Return & Refund Policy Overview

Please review our return and refund policies below to ensure a smooth transaction process.

Return Policy

  • Duration: You have 30 days from receiving your item to initiate a return.

  • Condition: Items must be unworn, unwashed, with original tags and packaging intact.

  • Shipping Costs: Customers are responsible for return shipping costs.

  • Packaging: Ensure returned items are well-packaged to avoid damage during transit.

  • Tracking: Use a trackable and insured shipping method as we are not liable for items lost or damaged on return.

  • Initiating a Return: Contact us at cs@everymarket.com to start your return. We will provide a return shipping label and instructions upon approval. Returns without prior approval will not be accepted.

How to Return

  • Method: Returns must be sent back by mail to the address provided in the return instructions.

Return Label

  • Defective Products: Return labels are provided for defective items.

  • Non-Defective Returns: Customers are responsible for obtaining their return shipping label.

Product Conditions for Return

  • Eligible Products: Returns are only accepted for items in new condition.

Nonreturnable Items

Certain items are not eligible for return:

  • Electronic devices after 30 days (e.g., computers, laptops, Kindles)

  • Gift cards, prepaid game cards

  • Perishable goods, live insects, some jewelry, some health and personal care items

  • Customized or personalized products

  • Items with special shipping restrictions

Refund Policy

  • Window: Eligible products may be returned within 30 days of delivery for a refund.

  • Refund Method: Refunds are processed to the original payment method or as store credit for items purchased with gift cards.

  • Processing Time: Refunds are processed within 3-5 business days after we receive the return; please allow additional time for shipping and bank processing.

Claims

Inspect your order upon arrival and report any defects, damages, or incorrect items immediately to allow us to address the issue. For claims, contact our support team with details of the issue.

Exchange Policy

For the quickest service, return your original item and place a new order for the desired product once your return is accepted.

Return Address

EveryMarket Customer Service 2101 E Terra Ln, O'Fallon, MO 63366

Customer Support

Available 24/7 for any questions or assistance needed:

  • Phone: +1 636-312-5925

  • Email: cs@everymarket.com

 

产品特色

目  录
第1章 光刻工艺概述 1
1.1 从微电子器件的微型化到纳米技术 1
1.2 发展历程 3
1.3 步进扫描投影光刻机的空间像5
1.4 光刻胶工艺 8
1.5 工艺特性参数 10
1.6 总结.16
参考文献 17

第2章 投影光刻成像理论 19
2.1 投影光刻机 19
2.2 成像理论 20
2.2.1 傅里叶光学描述方法 20
2.2.2 倾斜照明与部分相干成像 24
前  言
先进半导体光刻是超精密微纳结构制备技术,是超精密光学系统与精巧设计、高度优化的光化学材料和工艺的高度融合,支撑了现代信息社会的发展。该技术有机地结合了应用光学、化学与材料科学,为应用科学与技术领域的科学家和工程师提供了理想的施展空间。多年来,光刻图形化技术的发展主要由尺寸微缩驱动,专注于提高分辨率,不断延续戈登 ·摩尔的预言,将更多组件集成进集成电路中。尽管这种微缩尚未达到极限,但在半导体芯片上制备更多、更小、均匀、无缺陷微细图形的难度越来越大,成本也不断提高。用于新兴应用的下一代光刻技术需要聚焦三维形状控制、新型(功能)材料集成、非平面图形化工艺、应用导向型目标图形设计等不同需求。光刻技术 50多年发展历程中积累的知识和经验,为开发新型微纳技术的应用打下了坚实的基础。
本书的内容主要来源于本人在埃尔朗根 -纽伦堡大学(埃尔朗根 -纽伦堡弗里德里希 -亚历山大大学)开设的光刻课程,课程内容包括光刻技术、物理效应和建模等。本书还收录了本人为一些公司以及学术会议同期活动开设的光刻专题讲座的内容。本书旨在帮助物理、光学、计算工程、数学、化学、材料科学、纳米技术和其他专业背景的学生开启通往纳米制造光刻技术领域的大门,帮助工程师和管理人员了解光刻领域的常见方法与应用,拓展知识面。

Shipping Overview: 

Free Shipping: We offer free shipping on most orders within the U.S. Certain items may require a shipping fee due to size or handling needs. 

Order Processing: Please allow 1-2 business days for order processing and preparation before shipment. 

Domestic Shipping: Orders within the U.S. are shipped via USPS or FedEx, depending on the origin of the product. The average transit time is 3-7 business days. 

International Shipping: Currently, we only ship within the USA. 

Tracking Information: Every order is trackable. You will receive a tracking number once your order has been shipped. Products may be shipped from various global fulfillment centers.

Shipping Delays: 

Please note that shipping times may vary due to factors beyond our control, such as weather conditions, natural disasters, or peak holiday periods. While we strive to ensure timely delivery, the exact arrival time cannot be guaranteed and is managed by the shipping carrier.

Shipping Options:

  • Standard Delivery: Most orders are shipped within 3-7 business days. Larger items may utilize LTL shipping for safe handling.

  • Handling Time: We handle shipments on business days (Monday - Friday), with a preparation time of 1-2 days.

  • Additional Charges: Some items require additional shipping charges due to their size, weight, or special handling. These charges are specified on the product pages and are not eligible for shipping discounts.

  • Exclusions: Gift cards, packaging, taxes, and prior purchases do not count toward the minimum purchase requirement for free shipping. This offer is valid only for shipments to U.S. addresses, including Puerto Rico.

Delivery Details:

  • Estimates: Standard shipping within the US typically takes 3-7 business days. These are estimates and not guarantees.

  • Shipping Restrictions: We ship to all 50 states, Washington, DC, U.S. territories, and APO/FPO/DPO addresses. Shipping options vary based on the delivery address.

  • Remote Areas: Shipments to remote areas may incur additional charges or require pickup from a nearby shipping partner’s location.

Shipping Confirmation:

You will receive a shipping confirmation email with a tracking number as soon as your order is dispatched. If you do not receive this email immediately, please be assured that your items will arrive within the estimated delivery window provided at checkout.

Order Modifications:

If you need to cancel or modify your order, please contact our customer support immediately.

Issues with Delivery:

If your order shows as delivered but you have not received it, please contact the shipping carrier directly to resolve the issue. For persistent problems, contact our customer service at cs@everymarket.com.

Customer Support:

Our team is available 24/7 to assist you with any questions or concerns regarding your order. We are committed to ensuring a smooth shopping experience.

Return & Refund Policy Overview

Please review our return and refund policies below to ensure a smooth transaction process.

Return Policy

  • Duration: You have 30 days from receiving your item to initiate a return.

  • Condition: Items must be unworn, unwashed, with original tags and packaging intact.

  • Shipping Costs: Customers are responsible for return shipping costs.

  • Packaging: Ensure returned items are well-packaged to avoid damage during transit.

  • Tracking: Use a trackable and insured shipping method as we are not liable for items lost or damaged on return.

  • Initiating a Return: Contact us at cs@everymarket.com to start your return. We will provide a return shipping label and instructions upon approval. Returns without prior approval will not be accepted.

How to Return

  • Method: Returns must be sent back by mail to the address provided in the return instructions.

Return Label

  • Defective Products: Return labels are provided for defective items.

  • Non-Defective Returns: Customers are responsible for obtaining their return shipping label.

Product Conditions for Return

  • Eligible Products: Returns are only accepted for items in new condition.

Nonreturnable Items

Certain items are not eligible for return:

  • Electronic devices after 30 days (e.g., computers, laptops, Kindles)

  • Gift cards, prepaid game cards

  • Perishable goods, live insects, some jewelry, some health and personal care items

  • Customized or personalized products

  • Items with special shipping restrictions

Refund Policy

  • Window: Eligible products may be returned within 30 days of delivery for a refund.

  • Refund Method: Refunds are processed to the original payment method or as store credit for items purchased with gift cards.

  • Processing Time: Refunds are processed within 3-5 business days after we receive the return; please allow additional time for shipping and bank processing.

Claims

Inspect your order upon arrival and report any defects, damages, or incorrect items immediately to allow us to address the issue. For claims, contact our support team with details of the issue.

Exchange Policy

For the quickest service, return your original item and place a new order for the desired product once your return is accepted.

Return Address

EveryMarket Customer Service 2101 E Terra Ln, O'Fallon, MO 63366

Customer Support

Available 24/7 for any questions or assistance needed:

  • Phone: +1 636-312-5925

  • Email: cs@everymarket.com

 

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